Model ZDF-62B5 compound vacuum gauge is composed of 2 sets of low vacuum measuring units and 1 set of high vacuum measuring units. One unit of resistance gauge (RG 2)is used to achieve the measurement (1.0×10E5Pa~1.0×10E-7Pa)independently, the unit of resistance gauge( RG1) combined with ionization gauge, as compound unit, is to achieve the continuous control and measurement (1×10E5~1×10E-7Pa).