Turbo Molecular Pump, FF-63/80E with integrated Drive module, Water/Air cooling, Grease lubrication
| Flange（In） | ISO-K/CF63 | Max. Fore-vacuum Pressure | N2：1500 |
| Flange（Out） KF | DN16 | Gas Throughout （sccm） | N2：35 |
| Pumping Speed( L/s） | N2：63-80 | He：30 | |
| He：55 | H2：19 | ||
| H2：34 | Ar：38 | ||
| Ar：65 | Rotation Speed （ rpm） | 72000 | |
| Compression Ratio | N2：109 | Run-Up Time（min） | ≤2 |
| He：105 | Cooling Type,Standard | Water or Air | |
| H2：104 | Cooling Water Consumption （ L/min） | 1 | |
| Ar：109 | Cooling Water Temperature（℃） | ≤25 | |
| Ultimated Pressure（Pa) | CF：5×10-6 | Power Connection:Voltage （V AC） | DC24/AC220 |
| ISO-K：3×10-5 | Max.Power Consumption （W) | 90 | |
| Max. Continuous Fore-vacuum pressure(Pa) | 500 | Controller Model | TCP-100 |
Instrumental:
Series molecular pumps for instruments developed by KYKY for the instrument industry are compact high-performance types. It can perfectly meet the challenging requirements in instrument field; due to higher rotating speed and more optimal extracting structure, It is compatible with multiple backing pumps, and has stronger pumping capability for small molecular gases.
Advantages:
1. Compact structure for system integration
2. Module design for more selections
3. Higher fore-pressure tolerance
4. Any mounting position
5. Adjustable rotating speed
Applications:
Series molecular pumps for instruments are suitable choices for high-vacuum generation equipment in fields of mass spectrometry, surface analysis and other scientific researches.
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