Turbo Molecular Pump, FF-160/620E, Water cooling, Oil lubrication
Advantages:
1. Good performance under harsh environmental (high temperature, dust, etc.).
2. Stable performance and long service life
3. Simple maintenance, convenient operation
Applications:
The oil lubrication turbo pumps are mainly used in industrial leak detection, PVD, CVD, ion implantation, vacuum electronic components manufacturing, low-E glass, ITO glass, optical coating, solar cells, electron beam welding, vacuum furnace and other industries.
Specifications ：
| Flange（In） |
DN150 CF/ISO-K |
Max. Continuous Fore-vacuum pressure(Pa) |
240 |
| Flange（Out） KF |
DN40 KF |
Max. Fore-vacuum Pressure （Pa） |
N2:350 |
| Pumping Speed( L/s） |
N2:600 |
Gas Throughout （sccm） |
N2：1200 |
|
He：380 |
He：880 |
||
|
H2：240 |
H2：700 |
||
|
Ar：580 |
Ar：450 |
||
| Compression Ratio |
N2：109 |
Rotation Speed （ rpm） |
36000 |
|
He：105 |
Run-Up Time（min） |
≤9 |
|
|
H2：104 |
Cooling Type,Standard |
Water/Air |
|
|
Ar：109 |
Cooling Water Consumption （ L/min） |
≥1 |
|
| Ultimate Pressure（Pa) |
CF：6×10-8 |
Cooling Water Temperature（℃） |
≤25 |
|
ISO-K：6×10-7 |
Power Connection:Voltage （V AC） |
220±22 |
|
| Controller Model |
TCDP-II |
Max.Power Consumption （W) |
≤500 |
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