Turbo Molecular Pump, FF-100/110E, Air cooling, Grease lubrication, 110L/s N2
The grease-lubrication pump is equipped with ceramic bearing, which is usually of a self-sealed structure, consisting of a bearing inner ring, a bearing outer ring, balls, holders, a sealing end cover and lubricating grease. Shafting support structure applied to the grease-lubricated ceramic bearing has advantages of simple structure, free maintenance and low power consumption, so that molecular pump products can be installed in any orientation, and only need to be maintained once every 3-5 years in normal operating conditions.
The characteristics: the grease lubrication turbo pump
1. Stable performance.
2. Easy to operate.
3. Compact structure.
4. Multiple applications.
The applications: of grease lubrication turbo pumps are mainly in the fields:
1. solar cells, 2. Low-E glass, 3. ITO glass, 4. accelerators, 5. plasma technology, 6. lamp making, 7. vacuum leak detection
Specifications:
| Flange(In) | ISO-K/CF100 |
| Flange(Out) KF | DN25 |
| Pumping Speed( L/s) | N2:110 |
| He:110 | |
| H2:50 | |
| Ar:100 | |
| Compression Ratio | N2:108 |
| He:102 | |
| H2:102 | |
| Ar:108 | |
| Ultimated Pressure(Pa) | CF:2×10-7 |
| ISO-K:2×10-6 | |
| Max. Continuous Fore-vacuum pressure(Pa) | 200 |
| Max. Fore-vacuum Pressure | N2:300 |
| Gas Throughout (sccm) | N2:300 |
| He:240 | |
| H2:180 | |
| Ar:110 | |
| Rotation Speed ( rpm) | 42300 |
| Run-Up Time(min) | ≤3 |
| Cooling Type,Standard | Air |
| Cooling Water Consumption ( L/min) | no less than 1 |
| Cooling Water Temperature(℃) | ≤25 |
| Power Connection:Voltage (V AC) | 220±22 |
| Max.Power Consumption (W) | 300 |
| Controller Model | FD-110B |