Turbo Molecular Pump, F-400/3500B, Water cooling, Oil lubrication
Advantages:
This series of pump is good at performance under harsh environmental (high temperature, dust, etc.), stable in performance and with long service life, and simple maintenance and convenient operation as well.
Applications:
Main applications are in industrial leak detection, PVD, CVD, ion implantation, vacuum electronic components manufacturing, low-E glass, ITO glass, optical coating, solar cells, electron beam welding, vacuum furnace and other industries
Specifications:
| Flange（In） | DN400 ISO-K | Gas Throughout （sccm） | N2：5500 |
| Flange（Out） KF | DN100 | He：4000 | |
| Pumping Speed( L/s） | N2：3500 | H2：3200 | |
| He：2650 | Ar：2100 | ||
| H2：1280 | Rotation Speed （ rpm） | 13500 | |
| Ar：3200 | Run-Up Time（min） | ≤18 | |
| Compression Ratio | N2：108 | Cooling Type,Standard | Water |
| He：103 | Cooling Water Consumption （ L/min） | ≥1 | |
| H2：102 | Cooling Water Temperature（℃） | ≤25 | |
| Ar：108 | Power Connection:Voltage （V AC） | DC24/AC220 | |
| Ultimated Pressure（Pa) | 6×10-6 | Max.Power Consumption （W) | ≤1100 |
| Max. Continuous Fore-vacuum pressure(Pa) | 100 | Controller Model | FD-III |
| Max. Fore-vacuum Pressure | N2：300 | Weight (kgs) | 130 |
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