Turbo Molecular Pump , 4500L/s, F-400/4500 , Oil lubrication

Short Description:

F-400/4500

Turbo Molecular Pump , 4500L/s, F-400/4500 , Oil lubrication

KYKY developed the oil lubrication turbo pumps of compact and high-performance with advantages of compact structure, convenient operation, flexible installation, wide application range and stable performance.


Product Detail

Product Tags

F-400/4500

Turbo Molecular Pump , 4500L/s, F-400/4500 , Oil lubrication

KYKY developed the oil lubrication turbo pumps of compact and high-performance with advantages of compact structure, convenient operation, flexible installation, wide application range and stable performance.

Advantages: 
This series of pump is with big pumping capacity, 4500L/s and lower vibration, shock resistance, smaller dimension, and faster start /stop and good reliability.

Applications: 
Main applications are in industrial leak detection, PVD, CVD, ion implantation, vacuum electronic components manufacturing, low-E glass, ITO glass, optical coating, solar cells, electron beam welding, vacuum furnace and other industries

Specifications:

Specifications:

Flange(In)  DN400 ISO-K Gas Throughout (sccm) N2:5500
Flange(Out) KF DN100 He:4000
Pumping Speed( L/s) N2:4500 H2:3200
He:3200 Ar:2100
H2:2000 Rotation Speed ( rpm) 15300
Ar:4200 Run-Up Time(min) ≤10
Compression Ratio N2:5*107 Cooling Type,Standard Water
He:103 Cooling Water Consumption ( L/min) ≥1
H2:5*102 Cooling Water Temperature(℃) ≤25
Ar:5*107 Power Connection:Voltage (V AC) DC24/AC220
Ultimated Pressure(Pa) <=2*10-6 Max.Power Consumption (W) ≤1100
Max. Continuous Fore-vacuum pressure(Pa) 100 Controller Model FD-III
Max. Fore-vacuum Pressure N2:300 Weight (kgs, net) 118

Dimensions:

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