SEM-EM8100F, Resolution 1nm@30kV(SE), Magnification 15x-800, 000x
It is the Upgrade version of EM8000, with upgraded E-Beam tube acceleration, varies vacuum mode, available to observe non-conducting sample at low voltage without sputtering, easy, convenient and friendly operation system, multiple extension remodel plan. It also the first FEG SEM which has the resolution at 1nm(30kV).
Advantages:
1,Schittky electron gun, high brightness, good monochromaticity, small beam spot, long life duration.
2,With E-beam tube accelaration, optional stage deceleration
3,Stable beam current, low energy spread
4,Non- conducting sample observe without sputtering in low voltage
5,Easy, convenient and friendly operation interface
6,Huge 5 axes motorized stage
Specifications:
| Configuration | |
| Resolution | 1nm@30kV(SE) |
| 3nm@1Kv(SE) | |
| 2.5nm@30kV(BSE) | |
| Magnification | 15x-800,000x |
| Accelerating Voltage | 0-30kV continuous&adjustable |
| Electron Gun | Schottky field emission gun |
| Cathode Emitter | Tungsten mono-crystal |
| Five Axes Eucentric Auto Stage | X:0~150mm |
| Y:0~150mm | |
| Z:0~60mm | |
| R:360° | |
| T:-5°～75° | |
| Max Specimen | 320mm |
| L*W*H | 342mm*324mm*320mm(inside chamber size) |
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