It is the Upgrade version of EM8000, with upgraded E-Beam tube acceleration, varies vacuum mode, available to observe non-conducting sample at low voltage without sputtering, easy, convenient and friendly operation system, multiple extension remodel plan. It also the first FEG SEM which has the resolution at 1nm(30kV).
Advantages:
1,Schittky electron gun, high brightness, good monochromaticity, small beam spot, long life duration.
2,With E-beam tube accelaration, optional stage deceleration
3,Stable beam current, low energy spread
4,Non- conducting sample observe without sputtering in low voltage
5,Easy, convenient and friendly operation interface
6,Huge 5 axes motorized stage
Specifications:
Configuration | |
Resolution | 1nm@30kV(SE) |
3nm@1Kv(SE) | |
2.5nm@30kV(BSE) | |
Magnification | 15x-800,000x |
Accelerating Voltage | 0-30kV continuous&adjustable |
Electron Gun | Schottky field emission gun |
Cathode Emitter | Tungsten mono-crystal |
Five Axes Eucentric Auto Stage | X:0~150mm |
Y:0~150mm | |
Z:0~60mm | |
R:360° | |
T:-5°~75° | |
Max Specimen | 320mm |
L*W*H | 342mm*324mm*320mm(inside chamber size) |