Flange(In) | CF | 63CF | recommended forevacuum pressure | Pa | <50 |
forevacuum pump | GHD-031B(oil)( dry pump optional) | ||||
Flange(Out) | ISO-KF | DN25 | Cooling Type,Standard | Air | |
Pumping Speed | l/s | N2:62 | |||
He:55 | |||||
H2:34 | Input voltage/ frequency | V/Hz | 220±22/50 | ||
Ar:65 | Environment temperature (℃) |
Air cooling |
5℃-32℃ |
||
Compression Ratio | N2:109 | ||||
He:105 | mounting position | Vertical | |||
H2:104 | Controller Model | TCP-100 | |||
Ar:109 |
L*W*H |
mm | 400×300×260 | ||
Ultimate Pressure | Pa | CF:5×10-5 | |||
Weight | kg |
21 |
Pump station FJ-80, Compact oil or dry backup pump optional:
The turbo pumping station is a piece of clean high (ultrahigh) obtaining equipment, and it is a vacuum obtaining system mainly consists of a molecular pump and a mechanical pump according to vacuum knowledge and principle. The products in this Specification include FJ-80, turbo pumping station, with corresponding pumping speed of 62L/s. The pumping speeds of the backing oil pumps are 0.5L/s, and the pump speeds of the backing dry pumps are 0.2L. These products are widely applied to the fields of surface analysis, accelerator technology, plasma technology, research laboratories, electric vacuum device manufacturing and other vacuum areas.
Configuration:
Frame | Portable unit |
Molecular pump | FF-63/80 |
Molecular pump control module |
TC-100 |
Backing pump | GHD-031B (oil pump) KNF 813.3 ANF (dry pump) |
Vacuum gauge | WPC400 (external, optional) |
Electromagnetic block valve | AirTAC |
Transition chamber | DN63/CF35/KF40 ( customizable) |
Other attachments | Corrugated pipe, hoop, bolts, block valve, oxygen-free copper sealing ring, etc |