Configurations:
Name | Number |
F-160/620 molecular pump and power supply | 1 |
RV-6 mechanical pump | 1 |
Frame | 1 |
Control power supply | 1 |
ZDF-11B5 combination vacuum gauge | 1 |
Other attachments |
Main Parameters:
Leaking rate of vacuum system: ≤ 1×10-9Pa·m3/S
Power supply voltage: 380V±10/50Hz
Cooling mode: air or water cooling
Ambient temperature for equipment utilization: 5-40℃
Ambient humidity for equipment utilization: ≤ 80%
Specifications:
Unit | FJ-620 | |
Flange(In) | DN150 CF | |
DN150 ISO-K | ||
Flange(Out) | ISO-KF | DN40 |
Pumping Speed | l/s | N2:600 |
He:380 | ||
H2:240 | ||
Ar:580 | ||
Compression Ratio | N2:109 | |
He:105 | ||
H2:104 | ||
Ar:109 | ||
Ultimate Pressure | Pa | CF:5×10-5 |
recommended forevacuum pressure | Pa | 100 |
forevacuum pump | RV-6( default ) | |
Cooling Type,Standard | Air or water | |
Cooling Water Consumpyion | L/min | >1 |
Cooling Water Temperature | ℃ | ≤25 |
Input voltage/ frequency | V/Hz | 380±20/50 |
Environment temperature (℃) | Water cooling | 5℃-40℃ |
Air cooling | 5℃-32℃ | |
mounting position | Vertical | |
Controller Model | TCDP-Ⅱ | |
L*W*H | mm | 550×690×956(LF) |
550×690×970(CF) | ||
Weight | kg | 117 |