Advantages:
1. Good performance under harsh environmental (high temperature, dust, etc.).
2. Stable performance and long service life
3. Simple maintenance, convenient operation
Applications:
The oil lubrication turbo pumps are mainly used in industrial leak detection, PVD, CVD, ion implantation, vacuum electronic components manufacturing, low-E glass, ITO glass, optical coating, solar cells, electron beam welding, vacuum furnace and other industries.
Specifications :
Flange(In) |
DN150 CF/ISO-K |
Max. Continuous Fore-vacuum pressure(Pa) |
240 |
Flange(Out) KF |
DN40 KF |
Max. Fore-vacuum Pressure (Pa) |
N2:350 |
Pumping Speed( L/s) |
N2:600 |
Gas Throughout (sccm) |
N2:1200 |
He:380 |
He:880 |
||
H2:240 |
H2:700 |
||
Ar:580 |
Ar:450 |
||
Compression Ratio |
N2:109 |
Rotation Speed ( rpm) |
36000 |
He:105 |
Run-Up Time(min) |
≤9 |
|
H2:104 |
Cooling Type,Standard |
Water/Air |
|
Ar:109 |
Cooling Water Consumption ( L/min) |
≥1 |
|
Ultimate Pressure(Pa) |
CF:6×10-8 |
Cooling Water Temperature(℃) |
≤25 |
ISO-K:6×10-7 |
Power Connection:Voltage (V AC) |
220±22 |
|
Controller Model |
TCDP-II |
Max.Power Consumption (W) |
≤500 |