KYKY invented the first set of Turbo Molecular Pump, Commercial Helium Leak Detector and Scanning Electron Microscope in China.
In 1970s, KYKY , SEM branch of KYKY successfully developed the first Scanning Electron Microscope in China.
Sputtering coater for SEM sample preparation,non-conducting sample preprocessing.
Medium gas:air or argon,with argon inlet and air inflation microadjuster. Customized available, for example(equip with coating thickness gauge)
Advantages:
small size; user-friendly operation; adapted to most of the metal target; Argon mode available.
Specifications:
Working Chamber Diameter: | 75-150mm |
Vacuum system | Rotary Pump for Evacuation, 2L/s |
Deposition Rate: | 2-10 nm/min |
Power: | 220V/50Hz |
Glass processing chamber | ∮100mm; 130mm High. |
Specimen stage size: | ∮40mm( Hold 6 specimen cups) |
Golden target size: | ∮58mm*0.12mm(thickness) |
Vacuum detection: | Pirani gage |
Vacuum protection: | 20 pa with microscale inflation valve |
Medium Gas: | Argon or air with argon gas special air inlet and gas regulating in microscale. |
Applications:
Specimen premade for scanning electron( capable of sputtering , gold. silver, copper, titanium and aluminium. )