Flange(In) | ISO-K/CF63 | Max. Fore-vacuum Pressure | N2:1500 |
Flange(Out) KF | DN16 | Gas Throughout (sccm) | N2:35 |
Pumping Speed( L/s) | N2:63-80 | He:30 | |
He:55 | H2:19 | ||
H2:34 | Ar:38 | ||
Ar:65 | Rotation Speed ( rpm) | 72000 | |
Compression Ratio | N2:109 | Run-Up Time(min) | ≤2 |
He:105 | Cooling Type,Standard | Water or Air | |
H2:104 | Cooling Water Consumption ( L/min) | 1 | |
Ar:109 | Cooling Water Temperature(℃) | ≤25 | |
Ultimated Pressure(Pa) | CF:5×10-6 | Power Connection:Voltage (V AC) | DC24/AC220 |
ISO-K:3×10-5 | Max.Power Consumption (W) | 90 | |
Max. Continuous Fore-vacuum pressure(Pa) | 500 | Controller Model | TCP-100 |
Instrumental:
Series molecular pumps for instruments developed by KYKY for the instrument industry are compact high-performance types. It can perfectly meet the challenging requirements in instrument field; due to higher rotating speed and more optimal extracting structure, It is compatible with multiple backing pumps, and has stronger pumping capability for small molecular gases.
Advantages:
1. Compact structure for system integration
2. Module design for more selections
3. Higher fore-pressure tolerance
4. Any mounting position
5. Adjustable rotating speed
Applications:
Series molecular pumps for instruments are suitable choices for high-vacuum generation equipment in fields of mass spectrometry, surface analysis and other scientific researches.