Specifications:
Flange(In) | ISO-K/CF100 | Max. Fore-vacuum Pressure | N2:500 |
Flange(Out) KF | DN25 | Gas Throughout (sccm) | N2:135 |
Pumping Speed( L/s) | N2:140 | He:80 | |
He:130 | H2:52 | ||
H2:75 | Ar:143 | ||
Ar:145 | Rotation Speed ( rpm) | 51000 | |
Compression Ratio | N2:107 | Run-Up Time(min) | ≤3 |
He:103 | Cooling Type,Standard | Water or Air | |
H2:103 | Cooling Water Consumption ( L/min) | no less than 1 | |
Ar:107 | Cooling Water Temperature(℃) | ≤25 | |
Ultimate Pressure(Pa) | CF:6×10-7 | Power Connection:Voltage (V AC) | DC24/AC220 |
ISO-K:6×10-6 | Max.Power Consumption (W) | 90 | |
Max. Continuous Fore-vacuum pressure(Pa) | 220 | Controller Model | TCP-100 |
Instrumental:
Series molecular pumps for instruments developed by KYKY for the instrument industry are compact high-performance types. It can perfectly meet the challenging requirements in instrument field; due to higher rotating speed and more optimal extracting structure, It is compatible with multiple backing pumps, and has stronger pumping capability for small molecular gases.
Advantages:
1. Compact structure for system integration
2. Module design for more selections
3. Higher fore-pressure tolerance
4. Any mounting position
5. Adjustable rotating speed
Applications:
Series molecular pumps for instruments are suitable choices for high-vacuum generation equipment in fields of mass spectrometry, surface analysis and other scientific researches.