High Quality Compound Vacuum Gauge - Magnetically Levitated Pump, CXF-320/3001E, Water cooling, ISO-F, On board – KYKY
High Quality Compound Vacuum Gauge - Magnetically Levitated Pump, CXF-320/3001E, Water cooling, ISO-F, On board – KYKY Detail:
The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force.
Series magnetically levitated molecular pumps are vacuum generation equipment developed by KYKY for meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments.
Advantages:
1. Zero friction during operation, and low power consumption
2. Easy to acquire really clean high vacuum and ultrahigh vacuum without lubrication for pumps
3. Capable of extracting corrosive gases for long term
4. High safety and long service life due to protection of bearings with precision ceramic balls
5. power generating function in case of sudden power-off
6. Free of friction
7. Free of pollution
8. Free of maintenance
9. Low vibration
10. installed in any orientation.
Applications:
Series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, CVD, PVD and ion implantation and gases easily coagulated at normal temperature.
Specifications:
| Model | CXF-320/3001E |
| Pump Speed(l/s,Air) | 3200 |
| Compression Ratio | >1×108 |
| Ultimate Vacuum(Pa) | ≤5×10-7 |
| Inlet Flange | ISO-F 320 |
| Outlet Flange | KF 40 |
| Rotation Speed(rpm) | 24000 |
| Run-up Time(min) | 12 |
| VIB (mm) | <0.05 |
| Backing Pump (L/s) | 15 |
| Mounting or ientation | Any |
| Cooling method | Water |
| Weight(kg)(With Controller) | 75 |
Technologies:
- Control Technology for Magnetic Bearing: a 5-axis magnetically levitated, based on advanced international control theory, to guarantee such significant advantages of the high-speed shafting as stable levitated and reliable operation.
- Motor Drive Control Technology: High-efficiency high-speed DC motor and servo control system, haveing maximum energy of the motor and to compensate the rotating speed of shafting automatically, thereby realizing stable start-up, reliable operation and automatic regulating function of dynamic energy.
- Carbon fiber composite rotor technology: Made by compounding high-strength aluminum alloy and light-weight carbon fiber. characterized of great reduction of weight and great improvement of strength, so that targets of high rotating speed, high performance and high reliability are achieved.
- Corrosion resisting technology: Surfaces of parts in chambers are treated with special process, so that the surfaces can resist corrosion caused by corrosive gases in semiconductor manufacturing processes for a long time. In addition, inert gases such as N2 are fully filled in shafting of the pumps to protect the low vacuum parts in the pumps, so that function of stably exhausting corrosive gases for long periods is realized.
- Heating temperature control system: equipped with an electric heater and a temperature controller, cooling water, air-bone heating, electric heating and heat carried by protective gases can be monitored and controlled during operation, temperature in the pumps can be maintained at some value for long term, some gaseous substances are not converted into solid substances at normal temperature and not deposited in the pumps, and requirements for special process such of etching can be met.
Product detail pictures:
Related Product Guide:
We're proud from the higher client fulfillment and wide acceptance due to our persistent pursuit of high quality both on product and service for High Quality Compound Vacuum Gauge - Magnetically Levitated Pump, CXF-320/3001E, Water cooling, ISO-F, On board – KYKY , The product will supply to all over the world, such as: Niger, Sevilla, Greece, Qualified R&D engineer will be there for your consultation service and we will try our best to meet your requirements. So please feel free to contact us for inquiries. You'll be able to send us emails or call us for small business. Also you are able to come to our business by yourself to get further knowing of us. And we will surely give you the best quotation and after-sale service. We're ready to build stable and friendly relations with our merchants. To achieve mutual success, we will make our best efforts to build a solid co-operation and transparent communication work with our companions. Above all, we are here to welcome your inquiries for any of our goods and service.
By Edwina from Southampton - 2018.11.11 19:52
The factory workers have rich industry knowledge and operational experience, we learned a lot in working with them,we are extremely grateful that we can encount a good company has excellent wokers.
By Rosalind from Manchester - 2017.11.20 15:58
