Main parameters:
Leaking rate of vacuum system: ≤ 1×10-9Pa·m3/S
Power supply voltage: 380V±10/50Hz
Cooling mode: water cooling (entering water temperature ≤ 25℃
Ambient temperature for equipment utilization: 5-40℃
Ambient humidity for equipment utilization: ≤ 80%
Configuration:
Name | Number |
F-160/700 molecular pump and power supply | 1 |
RV-6 mechanical pump | 1 |
Frame | 1 |
Control power supply | 1 |
ZDF-11B5 combination vacuum gauge | 1 |
Other attachments |
Features:
1.Quick starting
2.Easy operation
3.Water cooling protection
4.High vacuum
Specifications:
Unit | FJ-700 | |
Flange(In) | DN150 CF | |
DN150 ISO-K | ||
Flange(Out) | ISO-KF | DN40 |
Pumping Speed | l/s | N2:700 |
He:580 | ||
H2:260 | ||
Ar:680 | ||
Compression Ratio | N2:109 | |
He:107 | ||
H2:106 | ||
Ar:109 | ||
Ultimate Pressure | Pa | CF:5×10-5 |
recommended forevacuum pressure | Pa | 100 |
forevacuum pump | RV-6( default ) | |
Cooling Type,Standard | Water/Air | |
Cooling Water Consumpion | L/min | >1 |
Cooling Water Temperature | ℃ | ≤25 |
Input voltage/ frequency | V/Hz | 380±20/50 |
Environment temperature (℃) | Water cooling | 5℃-40℃ |
mounting position | Vertical | |
Controller Model | TCDP-Ⅱ | |
L*W*H | mm | 550×690×850(water) |
Weight | kg | 135 |
Maintanence:
1. Routine maintenance:
During the daily use of the equipment, pay attention to observing the vacuum pump’s oil level and the pump oil color; if the oil is lacking, supply it in time. If the pump oil color is abnormal, change it in time.
2. Maintenance during the running:
During running of the equipment, pay attention to maintain the pumped vacuum chamber clean, so as to avoid the debris entering into the vacuum chamber and cause the damage of the equipment.